NDSU Center for Nanoscale Science & Engineering

North Dakota State University

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  • Facilities & Equipment
  • Bioactive Materials Characterization
  • Combinatorial Science
    • Design
    • Polymer Synthesis
    • Polymer Screening
    • Coating Preparation
    • Coating Deposition
    • Coating Screening
    • Analysis
  • Electronics Design
    • Design & Testing
  • Electronics Prototype Fabrication
    • Advanced Chip Packaging & Assembly
    • Process Support Equipment
    • Test & Inspection
    • Fluidic Self Assembly
    • Wafer Processing
  • Materials Characterization
  • RFID Lab - RWSL

Electronics Prototype Fabrication

Wafer Processing

Annealing/curing equipment

  • Comac Engineering Designs Conveyer Dryer
  • Blue M Vacuum Oven
  • Heraeus Vacutherm VT6130 Vacuum Oven
  • Thermco MB-80 Furnace
  • Yamato Convection Ovens (2)

Dry etch equipment

  • Trion Phantom RIE Plasma Etcher

Photo lithography equipment

  • SUSS MA-8 Aligner
  • SUSS RC-8 Spincoater
  • Yield Engineering Systems HMDS Oven

Thin/Thick film characteriztion equipment

  • J. A. Woollam M-88 Ellipsometer
  • KLA Tencor P-11 Profilometer
  • Micromanipulator 8840 Microprobe
  • MTI Proforma 300
  • Nanometrics Nanospec 2100
  • Olympus MX50 Microscope

Thin/Thick film deposition equipment

  • Kurt J. Lesker CMS-18 Sputterer
  • MDC CW-3 Bump Plating Machine
  • Oxford Plasmalab 100 PECVD
  • Speedline Technologies MPM SMP Precision Stencil Printer

UV curing equipment

  • DYMAX UV Curer

Wet processing equipment

  • IPS VRP 70 Spray Processor Developer
  • IPS VRP 70 Spray Processor Etcher
  • IPS VRP 70 Spray Processor Stripper
  • Solitec 5110ND
  • Solitec 5110TD
  • WAFAB KOH Sink
  • WAFAB Piranha/HF Sink
  • WAFAB Solvent Sink
  • WAFAB Utility Sink

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